Download PDF MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
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MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
Download PDF MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
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From the Back Cover
Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: Expanded coverage of microfabrication plus assembly and packaging technologies The introduction of microgyroscopes, miniature microphones, and heat pipes Design methodologies for thermally actuated multilayered device components The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
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About the Author
Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.
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Product details
Hardcover: 576 pages
Publisher: Wiley; 2 edition (March 17, 2008)
Language: English
ISBN-10: 0470083018
ISBN-13: 978-0470083017
Product Dimensions:
7.6 x 1.5 x 9.3 inches
Shipping Weight: 2.4 pounds (View shipping rates and policies)
Average Customer Review:
5.0 out of 5 stars
3 customer reviews
Amazon Best Sellers Rank:
#1,377,356 in Books (See Top 100 in Books)
nice book.
Good
New in this edition are micro-fabricated gyroscopes and microphone elements, the latter of which is already appearing in consumer devices. The second edition updates modernize what was already an excellent book.I'd recommend that if you're not sure about spending the money on the book that you use amazon's search inside this book and take a bit of a look. Much as you'd do in a bookstore, thumb through, search for a couple of items of interest, that sort of thing.
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